Double-sided microscope - List of Manufacturers, Suppliers, Companies and Products

Bilateral Microscope System "TOMOS-80XY"

Equipped with an 8-inch electric XY stage and autofocus function! Precisely controls movement to prevent measurement errors.

The "TOMOS-80XY" is a dual-sided microscope system that automatically moves to the specified measurement points of a workpiece and can automatically measure the misalignment of patterns and alignment marks on the front and back of MEMS and semiconductor wafers. It automatically detects the edges of alignment marks such as circles, squares, and crosses, and measures the misalignment between their center coordinates. It registers XYZ stage control conditions, measurement conditions, creates maps, and automatically measures multiple locations on the workpiece. Additionally, it is equipped with an alignment function to correct the misalignment of the XY stage and the workpiece mounting position, ensuring precise movement control and preventing measurement errors. [Software Features (Excerpt)] - Front and back optical axis correction - Front and back lens magnification correction - Camera mounting angle correction - Automatic measurement of front and back position misalignment - Electric stage control and map movement control *For more details, please download the PDF or feel free to contact us.

Company：フローベル
Price：Other

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Bilateral Microscope System "TOMOS-50"

Introducing the front and back misalignment / dimensional measurement microscope. Achieved high precision at a low cost.

The "TOMOS-50" is a compact type of measurement system that can simultaneously capture the front and back of electronic components such as crystal oscillators, MEMS, and semiconductors, and measure with an accuracy of ±0.2μm or less. The front and back optical axis correction can be precisely adjusted using a micro stage and software. Additionally, it is also available for sale as a dual-sided microscope module for device integration. Please contact us for more information. 【Features】 ■ Compact type ■ Approximately 3 million pixels ■ Simultaneous capture of both sides, dimensional measurement, and position deviation measurement ■ High-precision correction of the front and back optical axis using a micro stage and software ■ Measurement of position deviation between front and back with a repeatability of ±0.2μm or less (varies depending on conditions) *For more details, please refer to the PDF document or feel free to contact us.

Company：フローベル
Price：Other

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Bilateral Microscope System "TOMOS-60XY"

Equipped with XY electric stage and autofocus function! Customization for software and more is also supported.

The "TOMOS-60XY" is a 6-inch electric XY stage dual-sided microscope system that can automatically measure multiple locations on a workpiece. It can automatically move to the specified measurement locations on the workpiece and measure the displacement of patterns and alignment marks on the front and back of quartz oscillators, MEMS, semiconductor wafers, and electronic components. Additionally, it is equipped with an alignment function for correcting the positional deviation between the XY stage and the workpiece, ensuring precise movement control and preventing measurement errors. 【Features】 ■ Automatically detects the edges of alignment marks such as circles, squares, and crosses, and measures the displacement between their center coordinates. ■ Controls XYZ stage conditions, measurement conditions, creates maps, and registers recipes to automatically measure multiple locations on the workpiece. *For more details, please download the PDF or feel free to contact us.

Company：フローベル
Price：Other

Electron microscope

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Bilateral Microscope System "TOMOS Series"

Correcting the optical axis shift of the microscope's front and back, variations in the objective lens magnification, and the camera's θ shift with images!

We would like to introduce our dual-sided microscope system, the "TOMOS series." Our lineup includes the "TOMOS-50" with a 4-inch stage, the "TOMOS-60" with a 6-inch stage, and the "TOMOS-50R1" with wide-field ring illumination. It captures both sides of quartz oscillators, MEMS, and electronic components simultaneously. Dimension measurements can be performed without the hassle of flipping the sample over. 【Features of TOMOS-50/60】 ■ Simultaneous imaging of both sides of quartz oscillators, MEMS, semiconductor wafers, and electronic components ■ Measurement of alignment marks and pattern shifts on both sides with repeatable accuracy of ±0.3μm ■ High-precision image processing correction for optical axis misalignment, lens magnification errors, and camera θ shifts ■ Supports autofocus function and electric XY stage (optional) *For more details, please download the PDF or feel free to contact us.